Bruker: ContourGT-X Surface Scanner

  • Monday, 22 May 2017 00:00

The Contour GT-X by Bruker has a self-calibrating, metrology optimising laser reference, automated measurement capabilities (focus, intensity, tip/tilt head, staging, FOV) and nanometer-scale resolution on high-contour surfaces.

The system can accommodate sample height of up to 100 mm, with a maximum weight of 23 kg. It has a maximum scan range of up to 10 mm, a scan range rate of 114 µm per sec with standard camera.

The system’s configuration includes an air table stabiliser kit for enhanced X, Y, Z wafer placement accuracy, to optimisation of PDU, EMO and vacuum systems for integration and modified vacuum chucks for autoloader end-effector compatibility.

APMEN Products, May/June 2017

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